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Silane Vaporization Chamber
Jason
Introduction The silane vaporization chamber deposits a gas-phase monolayer of the chemical trimethylchlorosilane (silane) to serve as a counter-adhesion agent for glass or silicon substrates. Purpose To redesign the silane chamber and overcome issues of corrosion and usability. Process In Progress
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Vacuum Chuck Wafer Holder
Jason
Introduction Spin coaters can spread thin and flat substrates onto wafers very evenly using centrifugal force. A vacuum chuck holds wafers using suction as the spin coater spins. Purpose To design a wafer holder for the CNSI clean room that can center wafers (3″ & 4″) onto the vacuum chuck. The wafers need to spin…
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QSR Solvent Comparison
Jason
Introduction 3D prints from the Stratasys F270 FDM printer are supported with the QSR support material. QSR is a dissolvable support material and can be dissolved in a hot bath of NaOH solution. The NaOH solution has been typically created using Ecoworks packets. A more cost effective alternative to Ecoworks has been identified as Oxi…